Luxtron acquires atomic absorption spectroscopy technology
Luxtron's
acquisition of Intelligent Sensor Technology, Inc. (IST) adds an exciting
new technology to its product line. Luxtron is a leading manufacturer
of sensing solutions for the semiconductor, medical and flat panel display
industries. The addition of IST's Atomic Absorption Spectroscopy (AAS)
systems will enable precise in-situ monitoring of thin film deposition
processes.
IST recently released its ATOMICAS™ system for non-intrusive monitoring
and control of thin film deposition processes. The unique optical design
of this powerful tool uses the highly discriminating nature of atomic
absorption spectroscopy to measure deposition rate, allowing precise composition
control. The non-intrusive nature of AAS technology minimises potential
disturbance to the process where precise control of layer composition
is critical to performance.